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    曝光方式对负性光敏聚酰亚胺图形化的影响

    Effect of Exposure Mode on Negative Photosensitive Polyimide Patterning

    • 摘要: 光刻胶产业化过程遇到的第一个技术屏障是实验室优化的材料组分和光刻工艺在工业生产线上不能再现图形,原因是实验室与工业生产线的曝光方式不同所致。本文以负性光敏聚酰亚胺树脂为例,配合以不同引发速率的引发剂,在相同的曝光能量下以步进式(高功率、短时间)和接触式(低功率、长时间)两种模式分别进行曝光实验。通过观察图形质量发现:步进式曝光匹配引发速率快的引发剂、接触式曝光配合引发速率慢的引发剂才能获得最佳的图形效果。结合自由基形成和扩散动力学诠释了不同曝光模式下的图形化规律,为实验室产品走向工业应用提供了组分修正的理论依据。

       

      Abstract: The first technical obstacle encountered in the process of negative photoresist industrialization is that the lithographic pattern of the photoresist formula and lithography process optimized in the laboratory cannot be reproduced on the industrial production line. The reason for this could be the difference in exposure modes. A laboratory-prepared negative-tone photosensitive polyimide (n-PSPI) is used to prepare two polyimide photoresists with different photo-initiators. They were exposed under the same exposure energy in stepwise mode (high power, short time) and contact mode (low power, long time), respectively, being followed by solvent development for photolithography. Based on the resultant patterns, ideal lithography patterns can be obtained by stepper exposure with fast rate initiators or contact exposure with slow rate initiators. On the contrary, stepper exposure combined with slow rate initiators is prone to unclean development caused by free radical diffusion, while contact exposure combined with fast rate initiators results in low film retention rate caused by insufficient crosslinking. These undesirable graphics effects can not be improved by shortening or extending the exposure time. Therefore, the rational use of initiators is crucial for the formulation design of photoresists with different exposure modes. Combined with the theory of free radical formation and diffusion kinetics, the lithography pattern rule of n-PSPI photoresist under different exposure modes is explained. These conclusions can provide a theoretical guidance for formula modification when converting laboratory products to industrial applications.

       

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