高灵敏度的酯型光敏聚酰亚胺

High Sensitive Ester-Type Photosensitive Polyimide

摘要: 通过液－固逐步溶解缩聚的方法，合成了几种有较高分子量的光敏聚酰胺酸酯，并对它们的光刻性能进行了研究和讨论。其中，米赤酮或双叠氮对以联苯二酐间苯二胺残在为主的链结构的光敏ＰＩ前体的感光性能有最大的影响，由这种ＰＩ前体配制的光敏聚酰亚胺光刻胶具有最高的灵敏度。

Abstract: Several kinds of photosensitive polyamic acid ester (photo-PAE) with higher molecular weight were prepared by dissolution-condensation on the liquid-solid interface. The relationship between sensitivity and sensitizer as well as photocrosslinking agent wa